The Evactron E-Series of remote RF plasma cleaners reduces hydrocarbon contamination from high vacuum SEM/FIB chambers by breaking down the carbon and turning it into a gas phase that is then removed by the pumping system. It is also used for pre-cleaning of the samples prior to electron microscopy.
With instant ignition from any vacuum level brings the user highest cleaning rates at low pressures. It uses flowing afterglow to remove surface hydrocarbons from vacuum chambers operating with turbo molecular pumps Android For Hitachi 8200 / 4800 Series SEM.