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Sputtering Targets

Sputtering Targets

Sputtering targets are specialized materials employed for thin-film deposition in various industries, including electronics, energy, and textiles. These targets can be composed of different elemental or alloy compositions, such as pure metals or ceramics, and are bombarded by ions, causing atoms or molecules to be ejected from their surface. These particles then deposit on a substrate to create a thin, uniform film. Different types of sputtering targets exist, including planar or rotary targets and a range of materials, such as gold, silver, titanium, and tungsten. Their selection depends on different factors like the application requirements, material properties, and compatibility with the sputtering system.
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1 – 15 of 71 results
1

Copper sputtering target, 76.2mm (3.0in) dia x 6.35mm (0.250in) thick, 99.999% (metals basis), Thermo Scientific Chemicals

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
2

Copper sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.999% (metals basis), Thermo Scientific Chemicals

CAS: 7440-50-8 Molecular Formula: Cu Molecular Weight (g/mol): 63.55 MDL Number: MFCD00010965 InChI Key: RYGMFSIKBFXOCR-UHFFFAOYSA-N Synonym: cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer PubChem CID: 23978 ChEBI: CHEBI:30052 IUPAC Name: copper SMILES: [Cu]

PubChem CID 23978
CAS 7440-50-8
Molecular Weight (g/mol) 63.55
ChEBI CHEBI:30052
MDL Number MFCD00010965
SMILES [Cu]
Synonym cuprum,cobre,cuivre,blister,cathode,bronze,powder,anode,precipitates,kupfer
IUPAC Name copper
InChI Key RYGMFSIKBFXOCR-UHFFFAOYSA-N
Molecular Formula Cu
3

Iron sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis), Thermo Scientific Chemicals

CAS: 7439-89-6 Molecular Formula: Fe Molecular Weight (g/mol): 55.85 MDL Number: MFCD00010999 InChI Key: XEEYBQQBJWHFJM-UHFFFAOYSA-N Synonym: ferrum,iron, elemental,ferrous,remko,armco,ferrovac,hoeganaes eh,3zhp,ancor b,atomiron 5m PubChem CID: 23925 ChEBI: CHEBI:82664 IUPAC Name: iron SMILES: [Fe]

PubChem CID 23925
CAS 7439-89-6
Molecular Weight (g/mol) 55.85
ChEBI CHEBI:82664
MDL Number MFCD00010999
SMILES [Fe]
Synonym ferrum,iron, elemental,ferrous,remko,armco,ferrovac,hoeganaes eh,3zhp,ancor b,atomiron 5m
IUPAC Name iron
InChI Key XEEYBQQBJWHFJM-UHFFFAOYSA-N
Molecular Formula Fe
4

Molybdenum sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis), Thermo Scientific Chemicals

CAS: 7439-98-7 Molecular Formula: Mo Molecular Weight (g/mol): 95.95 MDL Number: MFCD00003465 InChI Key: ZOKXTWBITQBERF-UHFFFAOYSA-N Synonym: molybdenum, elemental,6+ ion,mchvl,vi ion,molybdenum, metallic,metco 63,atom,molybdenum, ion 6+,tsm1,amperit 106.2 PubChem CID: 23932 ChEBI: CHEBI:28685 IUPAC Name: molybdenum SMILES: [Mo]

PubChem CID 23932
CAS 7439-98-7
Molecular Weight (g/mol) 95.95
ChEBI CHEBI:28685
MDL Number MFCD00003465
SMILES [Mo]
Synonym molybdenum, elemental,6+ ion,mchvl,vi ion,molybdenum, metallic,metco 63,atom,molybdenum, ion 6+,tsm1,amperit 106.2
IUPAC Name molybdenum
InChI Key ZOKXTWBITQBERF-UHFFFAOYSA-N
Molecular Formula Mo
5

Silicon sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.999% (metals basis), Thermo Scientific Chemicals

CAS: 7440-21-3 Molecular Formula: Si Molecular Weight (g/mol): 28.09 MDL Number: MFCD00085311 InChI Key: XUIMIQQOPSSXEZ-UHFFFAOYSA-N Synonym: metal,silicone,defoamer s-10,flots 100sco,powder,dust,unii-z4152n8iui,polyeristalline powder,ccris 6599,ccris 6831 PubChem CID: 5461123 ChEBI: CHEBI:27573 IUPAC Name: silicon SMILES: [Si]

PubChem CID 5461123
CAS 7440-21-3
Molecular Weight (g/mol) 28.09
ChEBI CHEBI:27573
MDL Number MFCD00085311
SMILES [Si]
Synonym metal,silicone,defoamer s-10,flots 100sco,powder,dust,unii-z4152n8iui,polyeristalline powder,ccris 6599,ccris 6831
IUPAC Name silicon
InChI Key XUIMIQQOPSSXEZ-UHFFFAOYSA-N
Molecular Formula Si
6

Manganese sputtering target, 76.2mm (3.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis), Thermo Scientific Chemicals

CAS: 7439-96-5 Molecular Formula: Mn Molecular Weight (g/mol): 54.94 MDL Number: MFCD00011111 InChI Key: PWHULOQIROXLJO-UHFFFAOYSA-N Synonym: colloidal,mangan,manganese, elemental,cutaval,magnacat,metal alloy,tronamang,fume,mangan polish,compounds PubChem CID: 23930 ChEBI: CHEBI:35154 IUPAC Name: manganese SMILES: [Mn]

PubChem CID 23930
CAS 7439-96-5
Molecular Weight (g/mol) 54.94
ChEBI CHEBI:35154
MDL Number MFCD00011111
SMILES [Mn]
Synonym colloidal,mangan,manganese, elemental,cutaval,magnacat,metal alloy,tronamang,fume,mangan polish,compounds
IUPAC Name manganese
InChI Key PWHULOQIROXLJO-UHFFFAOYSA-N
Molecular Formula Mn
7

Niobium sputtering target, 50.8mm (2.0in) dia x 3.18mm (0.125in) thick, 99.95% (metals basis excluding Ta), Thermo Scientific Chemicals

CAS: 7440-03-1 Molecular Formula: Nb Molecular Weight (g/mol): 92.91 MDL Number: MFCD00011126 InChI Key: GUCVJGMIXFAOAE-UHFFFAOYSA-N Synonym: columbium,element,niobium-93,powder,foil,rod,vn 1,foil, 0.25mm 0.01in thick,columbio,niobio PubChem CID: 23936 ChEBI: CHEBI:33344 IUPAC Name: niobium SMILES: [Nb]

PubChem CID 23936
CAS 7440-03-1
Molecular Weight (g/mol) 92.91
ChEBI CHEBI:33344
MDL Number MFCD00011126
SMILES [Nb]
Synonym columbium,element,niobium-93,powder,foil,rod,vn 1,foil, 0.25mm 0.01in thick,columbio,niobio
IUPAC Name niobium
InChI Key GUCVJGMIXFAOAE-UHFFFAOYSA-N
Molecular Formula Nb
8

Tin sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.995% (metals basis), Thermo Scientific Chemicals

CAS: 7440-31-5 Molecular Formula: Sn Molecular Weight (g/mol): 118.71 MDL Number: MFCD00133862 InChI Key: ATJFFYVFTNAWJD-UHFFFAOYSA-N Synonym: powder,stannum,metallic,tin, elemental,wang,zinn,flake,tin, metal,silver matt powder,zinn german PubChem CID: 5352426 ChEBI: CHEBI:32990 IUPAC Name: tin SMILES: [Sn]

PubChem CID 5352426
CAS 7440-31-5
Molecular Weight (g/mol) 118.71
ChEBI CHEBI:32990
MDL Number MFCD00133862
SMILES [Sn]
Synonym powder,stannum,metallic,tin, elemental,wang,zinn,flake,tin, metal,silver matt powder,zinn german
IUPAC Name tin
InChI Key ATJFFYVFTNAWJD-UHFFFAOYSA-N
Molecular Formula Sn
13

Silicon(II) oxide sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.9% (metals basis), Thermo Scientific Chemicals

CAS: 10097-28-6 Molecular Formula: OSi Molecular Weight (g/mol): 44.084 MDL Number: MFCD00151536 InChI Key: LIVNPJMFVYWSIS-UHFFFAOYSA-N Synonym: silicon monoxide,silylene, oxo,silicon ii oxide,unii-1oqn9cbg7l,1oqn9cbg7l,silicon ii oxide, optical grade,sio,oxidosilicon,oxosilanylidene,oxosilylene PubChem CID: 66241 ChEBI: CHEBI:30588 IUPAC Name: oxoniumylidynesilanide SMILES: [O+]#[Si-]

PubChem CID 66241
CAS 10097-28-6
Molecular Weight (g/mol) 44.084
ChEBI CHEBI:30588
MDL Number MFCD00151536
SMILES [O+]#[Si-]
Synonym silicon monoxide,silylene, oxo,silicon ii oxide,unii-1oqn9cbg7l,1oqn9cbg7l,silicon ii oxide, optical grade,sio,oxidosilicon,oxosilanylidene,oxosilylene
IUPAC Name oxoniumylidynesilanide
InChI Key LIVNPJMFVYWSIS-UHFFFAOYSA-N
Molecular Formula OSi
14

Tungsten sputtering target, 50.8mm (2.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis), Thermo Scientific Chemicals

CAS: 7440-33-7 Molecular Formula: W Molecular Weight (g/mol): 183.84 MDL Number: MFCD00011461 InChI Key: WFKWXMTUELFFGS-UHFFFAOYSA-N Synonym: wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder PubChem CID: 23964 ChEBI: CHEBI:27998 IUPAC Name: tungsten SMILES: [W]

PubChem CID 23964
CAS 7440-33-7
Molecular Weight (g/mol) 183.84
ChEBI CHEBI:27998
MDL Number MFCD00011461
SMILES [W]
Synonym wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder
IUPAC Name tungsten
InChI Key WFKWXMTUELFFGS-UHFFFAOYSA-N
Molecular Formula W
15

Tungsten sputtering target, 76.2mm (3.0in) dia x 6.35mm (0.250in) thick, 99.95% (metals basis), Thermo Scientific Chemicals

CAS: 7440-33-7 Molecular Formula: W Molecular Weight (g/mol): 183.84 MDL Number: MFCD00011461 InChI Key: WFKWXMTUELFFGS-UHFFFAOYSA-N Synonym: wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder PubChem CID: 23964 ChEBI: CHEBI:27998 IUPAC Name: tungsten SMILES: [W]

PubChem CID 23964
CAS 7440-33-7
Molecular Weight (g/mol) 183.84
ChEBI CHEBI:27998
MDL Number MFCD00011461
SMILES [W]
Synonym wolfram,ion,va,tungsten, elemental,wolframium,unii-v9306cxo6g,4+ ion,tungsten, soluble compounds,tungsten, insoluble compounds,powder
IUPAC Name tungsten
InChI Key WFKWXMTUELFFGS-UHFFFAOYSA-N
Molecular Formula W